专利名称：METHOD AND APPARATUS FOR TESTING
ELECTRICAL CHARACTERISTICS OF OBJECTUNDER TEST
发明人：SUGA, Tadatomo,ITOH, Toshihiro,KOMATSU,
Shigekazu c/o Tokyo Electron LimitedIPD,KATAOKA, Kenichi
申请号：EP04745857.5申请日：20040608公开号：EP1637893B1公开日：20071114
摘要：At least one third pair of electrode 17 formed on a mounting surface 11C of astage 11 is in contact with a conductive layer Q formed on a first surface 31 of aninspection object, and an electrical path is formed between the both by using a frittingphenomenon.
申请人：TOKYO ELECTRON LTD,SUGA TADATOMO,ITOH TOSHIHIRO
地址：JP,JP,JP
国籍：JP,JP,JP
代理机构：Liesegang, Eva
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